发明名称 Vertical-Cavity Surface-Emitting Semiconductor Laser Diode And Method For The Manufacture Thereof
摘要 The present invention includes a vertical-cavity surface-emitting semiconductor laser diode having a resonator with a first distributed Bragg reflector, an active zone which has a p-n junction and is embedded into a semiconductor layer sequence, and a second distributed Bragg reflector. The semiconductor laser diode has an emission wavelength λ, wherein a periodic structure is arranged within the resonator as an optical grating made of semiconductive material and dielectric material, the main plane of extension of which is arranged substantially perpendicularly to the direction of emission of the semiconductor laser diode. The periodic structure is in direct contact with at least one of the semiconductor layers embedding the active zone and with at least one of the two distributed Bragg reflectors.
申请公布号 US2010128749(A1) 申请公布日期 2010.05.27
申请号 US20090623247 申请日期 2009.11.20
申请人 VERTILAS GMBH 发明人 AMANN MARKUS-CHRISTIAN;ORTSIEFER MARKUS
分类号 H01S5/187;H01L21/18 主分类号 H01S5/187
代理机构 代理人
主权项
地址