| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray source in which displacement of the focus of the X-rays is reduced. SOLUTION: The support member 60 of the X-ray source 1 supports a load of an X-ray tube support part 6 by being fixed to the X-ray tube support part 6 in a state that an X-ray emitting window 27h is exposed on one end side of the X-ray tube support part 6, and is separated from the X-ray tube support part 6 on the other end side of the X-ray tube support part 6. With this structure, when the X-ray tube support part 6 is thermally expanded, the X-ray tube support part 6 is extended from the one end side to the other end side of the tube support part 6 with the fixed side of the support member 60 as a reference, and this extension margin can be escaped to a clearance S between the support member 60 and the X-ray tube support part 6. Thereby, the displacement amount of the focus of the X-rays can be made as small as possible. COPYRIGHT: (C)2010,JPO&INPIT
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