发明名称 SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device effectively improved in drive force by using a distortion silicon technique. Ž<P>SOLUTION: The semiconductor device includes: a semiconductor layer formed on a semiconductor substrate; a transistor having a source-drain region and a channel region in the semiconductor layer; and an insulating film formed on a lower side of the channel region between the semiconductor substrate and the semiconductor layer, and including stress generating distortion in the channel region. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010118566(A) 申请公布日期 2010.05.27
申请号 JP20080291679 申请日期 2008.11.14
申请人 TOSHIBA CORP 发明人 YAMAGUCHI RIE;SANUKI TOMOYA
分类号 H01L29/786;H01L21/76;H01L21/762;H01L21/8238;H01L27/08;H01L27/092;H01L29/423;H01L29/49 主分类号 H01L29/786
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