| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for supplying a film-forming material of a film-forming apparatus having a simple structure, which can stably supply the film-forming material even when an amount of the material supplied from a hopper has changed. Ž<P>SOLUTION: The device 40 for supplying the film-forming material has a material hopper 41, a material feeder 43 and a control board 48. The material hopper 41 supplies the film-forming material 22 which is stored inside the hopper to the material feeder 43. The material feeder 43 has a cylindrical body 43c which receives the film-forming material 22 from the material hopper 41 and has a helical groove 43e on its inner wall surface 43d; transports the film-forming material 22 in the cylindrical body 43c to the upper end part 46a of the material feeder 43 by rotating the helical groove 43e, and discharges the material to the outside of the material feeder 43. The control board 48 controls the amount of the film-forming material 22 to be discharged from the upper end part 46a of the material feeder 43. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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