PROCESS AND APPARATUS FOR THE MODIFICATION OF SURFACES

摘要

The present invention relates to a process for coating a substrate with a wear resistant layer on the basis of carbon comprising the steps of i) providing a substrate containing a material which has an affinity for carbon ii) cleaning a surface of the substrate iii) deposition of a metal containing layer on the surface iv) ion-bombarding the coated surface v) deposition of a carbon layer on the surface. Further, the present invention relates to a substrate with a diamond-like carbon coating on the surface of the substrate and an apparatus for carrying out the process according to the invention.