发明名称 |
ELECTRONIC DEVICES INCLUDING CARBON NANO-TUBE FILMS HAVING BORON NITRIDE-BASED LINERS, AND METHODS OF FORMING THE SAME |
摘要 |
<p>Methods in accordance with this invention form a microelectronic structure by forming a carbon nano-tube ("CNT") layer, and forming a boron nitride layer ("BN liner") above the CNT layer, wherein the BN liner comprises: (1) a first portion disposed above and in contact with the CNT layer; and/or (2) a second portion disposed in and/or around one or more carbon nano-tubes in the CNT layer. Numerous other aspects are provided.</p> |
申请公布号 |
WO2010059362(A1) |
申请公布日期 |
2010.05.27 |
申请号 |
WO2009US62507 |
申请日期 |
2009.10.29 |
申请人 |
SANDISK 3D, LLC;JAYASEKARA, WIPUL PEMSIRI |
发明人 |
JAYASEKARA, WIPUL PEMSIRI |
分类号 |
H01L51/00;H01L27/10;H01L27/102;H01L51/10 |
主分类号 |
H01L51/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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