| 摘要 |
PROBLEM TO BE SOLVED: To sufficiently enhance conveyance efficiency of a substrate W by a floating conveyance device 1, while avoiding interference between the substrate W and a floating unit 23, etc. during conveyance of the substrate W. SOLUTION: This floating conveyance device 1 includes a wall member 41 for partitioning a negative pressure space S to generate negative pressure between conveying rollers 23 adjacent in the conveyance direction, and a suction pipe 47 communicated with the negative pressure space S and connected to an air suction source 49. COPYRIGHT: (C)2010,JPO&INPIT
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