发明名称 APPARATUS AND METHOD FOR FORMING 3D NANOSTRUCTURE ELECTRODE FOR ELECTROCHEMICAL BATTERY AND CAPACITOR
摘要 Embodiments described herein generally relate to an electrode structure for an electrochemical battery or capacitor, particularly, apparatus and methods of creating a reliable and cost efficient 3D electrode nano structure for an electrochemical battery or capacitor that has an improved lifetime, lower production costs, and improved process performance.
申请公布号 US2010126849(A1) 申请公布日期 2010.05.27
申请号 US20090620788 申请日期 2009.11.18
申请人 APPLIED MATERIALS, INC. 发明人 LOPATIN SERGEY D.;BACHRACH ROBERT Z.
分类号 C25D5/02;C25D5/08 主分类号 C25D5/02
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