The disclosure relates to sample inspection using an ion-beam microscope. In some embodiments, the disclosure involves the use of multiple detectors, each of which provides different information about a sample.
申请公布号
WO2009154953(A3)
申请公布日期
2010.05.27
申请号
WO2009US45131
申请日期
2009.05.26
申请人
CARL ZEISS SMT INC.;SIJBRANDIJ, SYBREN;NOTTE IV, JOHN, A.;THOMPSON, WILLIAM, B.
发明人
SIJBRANDIJ, SYBREN;NOTTE IV, JOHN, A.;THOMPSON, WILLIAM, B.