| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of processing a laminated thin film, in which effect of debris is reduced in the method of processing the laminated thin film using a laser beam. Ž<P>SOLUTION: The method of processing the laminated thin film, in which at least a first thin film layer and a second thin film layer are formed on a substrate and patterning of the first thin film and the second thin film is performed by irradiating laser beams with respect to both the first thin film layer and the second thin film layer, includes the following steps (1) and (2): (1) the step of emitting a laser beam to a different area 1b between a processing area 1 of the first thin film layer and a processing area 3 of the second thin film layer to process the first thin film layer; and (2) the step of emitting a laser beam to a common area 1a between the processing area 1 of the first thin film layer and the processing area 3 of the second thin film layer to process the first thin film layer and the second thin film layer. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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