APPARATUS FOR PROCESSING A SUBSTRATE

摘要

PURPOSE: A substrate processing apparatus is provided to improve efficiency of a work by reducing a non-operation time of a system and time for maintenance. CONSTITUTION: A chamber has an internal space. A substrate support unit(200) is installed in the chamber and includes a spin head on which a substrate is loaded. A processing container is installed to surround the spine head and collects processing fluid dispersed on the substrate and includes an upper body(110) and a lower body(120). The upper body surrounds the spin head and is combined with the chamber with a hinge shaft to be outputted to one side of the chamber. The lower body is arranged under the upper body and is connected to an exhaust line and a discharge line.