发明名称 SHAPE MEASURING APPARATUS AND DEFECT INSPECTING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a shape measuring apparatus excluding an influence of extraneous light and shortening processing time as well. Ž<P>SOLUTION: A laser projector A, the photoelectric conversion surface of a digital camera B, and an optical lens are arranged in accordance with the Scheimpflug condition. A measuring object M is irradiated with a slit-like laser beam emitted from the laser projector A, and image data is acquired by photographing the measuring object M with the digital camera B. The extraneous light is excluded by processing this image data with a one-dimensional mask of a mask processing means 23, to extract a surface shape from this image data. Afterwards, a three-dimensional shape data generating means 27 generates three-dimensional shape data from data on a plurality of surface shapes. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010117182(A) 申请公布日期 2010.05.27
申请号 JP20080289088 申请日期 2008.11.11
申请人 AISIN SEIKI CO LTD 发明人 YOSHIKAWA SATOHIKO;KUNO KOSHI
分类号 G01B11/24 主分类号 G01B11/24
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