发明名称 SYSTEMS, METHODS AND SOLUTIONS FOR CLEANING CRYSTAL GROWTH VESSELS
摘要 The disclosure provides mixed acid solutions for cleaning a vessel, such as a vessel used for growing a GaAs crystal, comprising nitric acid, hydrofluoric acid and water. Further, the disclosure also provides exemplary methods for cleaning a vessel for growing a GaAs crystal, by: a) immersing the vessel in a mixed acid solution; b) immersing the vessel in an ammonia solution; c) cleansing the vessel with a surfactant solution under supersonic vibration; and d) cleansing the vessel with deionized water under supersonic vibration.
申请公布号 US2010126524(A1) 申请公布日期 2010.05.27
申请号 US20090581160 申请日期 2009.10.19
申请人 FAN GUOMING 发明人 FAN GUOMING
分类号 C11D3/04;C23G1/02 主分类号 C11D3/04
代理机构 代理人
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