| 摘要 |
<p>PURPOSE: A processing method of a substrate processing apparatus for processing data backup and restoration of a substrate process device are provided to restore exact data by comparing data of a restored point and a specific point. CONSTITUTION: If an event is generated, the event is processed(S140, S142). The data is backed up according to the event. The history information about data backup is stored(S144). The data of the reconstitution point is searched when the restoration of data is necessary. It confirms whether the searched restoration data is the desired data. If the searched recovery data is the desired data, recovery data is transmitted.</p> |
