| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a MEMS sensor for simplifying a structure, reducing a thickness of the sensor, electrically stabilized, and effectively increasing the mass of a mass section in comparison with a conventional sensor, and its manufacturing method. <P>SOLUTION: The MEMS sensor has first and second substrates 1, 2 formed from silicon, and oppositely disposed in the height direction. The first substrate 1 is formed with the mass section 4, and an anchor section 5 connected to the mass section 4. The anchor section 5 is fixed to and supported by the second substrate 2. A space 6 is provided between the mass section 4 and the second substrate 2. A metal 7 having a specific gravity larger than the silicon is embedded in the mass section 4. <P>COPYRIGHT: (C)2010,JPO&INPIT |
