| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To make selectable DMD units having transmission glasses corresponding to the wavelengths of laser beams. <P>SOLUTION: A laser repair apparatus includes: a laser generator 31 capable of emitting laser beams of a plurality of wavelengths; a plurality of DMD units 37a, 37b covered with optical transmission plates 40 corresponding to each wavelength of laser beams; and a slide holder 36, on which a plurality of DMD units 37a, 37b are mounted. Further, there is provided a slider controller 16 for selectively carrying out changeover by moving the slide holder 36 so that a desired DMD unit 37a (or 37b) is disposed on a laser beam path. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
