| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the entire size of a device by regulating the flow rate of fluid without using a mechanical means. Ž<P>SOLUTION: A through-hole 2a for passing the fluid therethrough is provided at the center of a dielectric layer 2. Electrode layers 3a and 3b are formed respectively on both sides of the dielectric layer 2 in an annular shape around the through-hole 2a. The dielectric layer 2 is deformed by applying voltage to the electrode layers 3a and 3b, whereby the opening diameter of the through-hole 2a is changed. According to this, the flow rate of the fluid passing through the through-hole 2a can be regulated, and the flow regulation can be thus performed without using mechanical means. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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