Sensor arrangement for detection of electrical differential pressure, has membrane with piezoresistors interconnected with piezoresistors of other membrane so that signal of piezoresistors corresponds to difference between pressure values

摘要

The arrangement (10) has micromechanical sensor membranes (1, 2) subjectable on one side with measurement pressure values (P1, P2), where the membranes are equipped with piezoresistors (R11, R12, R21, R22) for detecting the pressure values. The piezoresistors of one of the membranes are interconnected with the piezoresistors of the other membrane to a wheatstone bridge (3), so that an output signal (U3) of the piezoresistors corresponds to the difference between the measurement pressure values. The membranes are formed in two separate elements, which are arranged in a common housing.