| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating technology with high heating efficiency and high control accuracy of heating temperature. SOLUTION: In a heating device 10 with a heating member 3 and a block member 4 stacked on an infrastructure member 1 through a thermal insulation member 2, and heating a heated object in contact with the block member 4 with heat transmission from the heating member 3, a heating member 5 such as a halogen lamp heater with good control responsiveness is mounted on a through-hole 3a set in protrusion inside the heating member 3 without contacting to have a predetermined gap g, and the heating member 3 is heated with radiation heat from the heating member 5. The heating member 3 is structured of a material with high thermal conductivity without concerning about stiffness or brittleness-proof for restraining thermal expansion of the heating member 5 or the like, and the heated object is enabled to be heated efficiently through the block member 4 from the heating member 3. COPYRIGHT: (C)2010,JPO&INPIT |
