| 摘要 |
Integrated microelectromechanical structure (30), provided with: a die (2), having a substrate (2) and a frame (2b), defining inside it a detection region (2c) and having a first side extending along a first horizontal axis (x); a driving mass (3), anchored to the substrate (2), set in the detection region (2c), and rotatable in a plane (xy) with an actuation movement about a vertical axis (z); and first and second pairs (16a',16b';16c',16d') of first sensing masses, suspended inside the driving mass (3) via elastic supporting elements (20) so as to perform a detection movement of rotation out of the plane (xy) in response to a first angular velocity (© x ); wherein the first sensing masses of the first pair (16a',16b') and the first sensing masses of the second pair (16c',16d') are aligned in respective directions (x 1 , X 2 ), having non zero inclinations of opposite sign with respect to the first horizontal axis (x). |
