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发明名称
摘要
申请公布号
JP4468408(B2)
申请公布日期
2010.05.26
申请号
JP20070150364
申请日期
2007.06.06
申请人
发明人
分类号
H01L21/8247;H01L27/10;H01L27/115;H01L29/788;H01L29/792
主分类号
H01L21/8247
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