发明名称
摘要 A fine metal structure having its surface furnished with microprojections of high strength, high precision and large aspect ratio; and a process for producing the fine metal structure free of defects. There is provided a fine metal structure having its surface furnished with microprojections, characterized in that the microprojections have a minimum thickness or minimum diameter ranging from 10 nanometers to 10 micrometers and that the ratio between minimum thickness or minimum diameter (D) of microprojections and height of microprojections (H), H/D, is greater than 1. There is further provided a process for producing a fine metal structure, characterized by comprising providing a substrate having a fine rugged pattern on its surface, applying a molecular electroless plating catalyst to the surface, thereafter carrying out electroless plating to thereby form a metal layer having the rugged pattern filled, and detaching the metal layer from the substrate to thereby obtain a fine metal structure furnished with a surface having undergone reversal transfer of the above rugged pattern.
申请公布号 JP4466074(B2) 申请公布日期 2010.05.26
申请号 JP20030431801 申请日期 2003.12.26
申请人 发明人
分类号 B81C1/00;G01N33/53;B29C33/38;B29C33/42;B81C99/00;B82B3/00;C12M1/00;C12N15/09;C23C18/16;C23C18/42;G01N37/00;H01J1/304;H01J9/02;H01L21/027 主分类号 B81C1/00
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