| 摘要 |
PROBLEM TO BE SOLVED: To provide an oscillation mechanism of a tape lapping device, which dispenses with a dedicated driving device for oscillating a workpiece in the axial direction to make oscillating motion. SOLUTION: In this oscillation mechanism of a tape lapping device, a pair of arms 4, 4, a pair of shoe assemblies 5, 5 supported on the paired arms 4, 4, and an arm opening and closing device 6 are integrally formed as an arm unit 10 to move in the axial direction of a workpiece. The arm unit 10 is supported on a bed 7 to move in the axial direction (X-axis direction) by an axial driving device 8 through a direct acting bearing (a linear guide), a ball spline or a roller spline 11, 12, and in tape lapping. The arm unit 10 oscillates the workpiece in the axial direction by the axial driving device 8 to apply oscillating motion to the workpiece. COPYRIGHT: (C)2007,JPO&INPIT |
