| 摘要 |
A method of manufacturing an electrostatic chuck. The chuck has a dielectric layer that comes into contact with an object to be held by the chuck and is made of silicone rubber or a resin. When manufactured, the dielectric layer is not affected by impurities remaining on the surface of or inside the dielectric layer, so that the performance of the dielectric layer does not vary or the separation of the dielectric layer does not occur from the beginning of the use of the chuck. The method has a step of pressing a heating plate (7), heated to a predetermined temperature, against a contact surface of the dielectric layer (6) before or after the dielectric layer (6) is installed on the surface of a substrate (3) where electrodes (5) are arranged. |
