| 发明名称 |
BACK-ILLUMINATED, THIN PHOTODIODE ARRAYS WITH TRENCH ISOLATION |
| 摘要 |
<p>Back-illuminated, thin photodiode arrays with trench isolation. The trenches are formed on one or both sides of a substrate, and after doping the sides of the trenches, are filled to provide electrical isolation between adjacent photodiodes. Various embodiments of the photodiode arrays and methods of forming such arrays are disclosed.</p> |
| 申请公布号 |
EP2188840(A1) |
申请公布日期 |
2010.05.26 |
| 申请号 |
EP20080797559 |
申请日期 |
2008.08.08 |
| 申请人 |
ARRAY OPTRONIX, INC. |
发明人 |
GOUSHCHA, ALEXANDER, O.;PAPADOPOULOS, GEORGE;DENNING, PERRY, A. |
| 分类号 |
H01L27/144;H01L27/146 |
主分类号 |
H01L27/144 |
| 代理机构 |
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