APPARATUS FOR TESTING SEMICONDUCTOR DEVICE AND METHOD FOR TESTING SEMICONDUCTOR DEVICE

摘要

PURPOSE: An apparatus for testing a semiconductor device and a method for testing the semiconductor device are provided to implement a heating and cooling test environment of inside a chamber by detecting a predetermined temperature. CONSTITUTION: A chamber has a constant space. A plurality of semiconductor devices(50) are located in the chamber. A temperature conversion module is connected to the chamber. The temperature conversion module heats and cools the chamber. The internal space of the chamber keeps a constant temperature. The control module(400) transmits an electric signal to the temperature conversion module. The control module selectively heats and cools the internal space of the chamber.