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发明名称
METHOD AND SYSTEM FOR CONDITIONING A VAPOR DEPOSITION TARGET
摘要
申请公布号
EP2013373(A4)
申请公布日期
2010.05.26
申请号
EP20070761416
申请日期
2007.04.27
申请人
ADVANCED ENERGY INDUSTRIES, INC.
发明人
ILIC, MILAN;HUFF, ROBERT;MCDONOUGH, GEORGE
分类号
C23C14/34;C23C14/54
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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