COATING LIQUID FOR FORMING LOW DIELECTRIC CONSTANT AMORPHOUS SILICA COATING FILM, METHOD FOR PREPARING SAME, AND LOW DIELECTRIC CONSTANT AMORPHOUS SILICA COATING FILM OBTAINED FROM SAME,申请号EP20050793074-传众专利搜索

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发明名称	COATING LIQUID FOR FORMING LOW DIELECTRIC CONSTANT AMORPHOUS SILICA COATING FILM, METHOD FOR PREPARING SAME, AND LOW DIELECTRIC CONSTANT AMORPHOUS SILICA COATING FILM OBTAINED FROM SAME
摘要
申请公布号	EP1813655(A4)	申请公布日期	2010.05.26
申请号	EP20050793074	申请日期	2005.10.11
申请人	CATALYSTS & CHEMICALS INDUSTRIES CO., LTD.	发明人	ARAO, HIROKI;EGAMI, MIKI;NAKASHIMA, AKIRA;KOMATSU, MICHIO
分类号	C09D183/04;B05D7/24;C01B33/12;C08L83/08;C09D5/25;C09D7/14;C09D183/02;H01L21/312;H01L21/316;H01L21/768	主分类号	C09D183/04
代理机构		代理人
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