| 发明名称 |
MEMS switches with deforming membranes |
| 摘要 |
MEMS switches are formed with membranes or layers that are deformable upon the application of a voltage. The MEMS switches may comprise compliant terminals and/or contact conductors to produce contact swiping.
|
| 申请公布号 |
US7724417(B2) |
申请公布日期 |
2010.05.25 |
| 申请号 |
US20060641649 |
申请日期 |
2006.12.19 |
| 申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC. |
发明人 |
LEWIS ALAN;KOGUT LIOR;TUNG MING-HAU |
| 分类号 |
G02B26/00;G02B26/12 |
主分类号 |
G02B26/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
