| 摘要 |
PURPOSE: An apparatus for processing a substrates is provided to save a liquid medicine which is used in a processing a substrate by spraying liquid medicine according to the movement of the substrate. CONSTITUTION: In a apparatus for processing a substrates, a processing chamber(110) provides a space in which a predetermined process is operated. A nozzle unit sprays the medicine of a certain type on a substrate on the substrate. A spray controller controls a nozzle by controlling the position of movement. A substrate detection unit detects the position of the substrate.
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