APPARATUS OF VAPOR PHASE-SYNTHESIS FOR CARBONNANOTUBES

摘要

PURPOSE: A carbon nanotube vapor phase synthesis equipment is provided, which improves productivity and makes quality of the carbon nanotube uniform. CONSTITUTION: A carbon nanotube vapor phase synthesis equipment comprises: a catalyst supply part(120) which consecutively supplies catalyst to the inside of a chamber; a gas supply part(130) supplying the source gas to the inside of the chamber; a mixer(140) which is equipped inside a vertical type reaction chamber and mixes the catalyst provided from the upper part; a heating part(150) heating the outside of the chamber; a recovery part(160) collecting the carbon nanotube; and a plurality of spreader plates(170) which uniformly distribute source gas to the inside of the chamber.