| 摘要 |
<p>PURPOSE: An apparatus for aligning substrates is provided to reduce manufacturing costs by using a link structure having a simple structure. CONSTITUTION: In a apparatus for aligning substrates, a substrate is mounted in a stage. A plurality of driving bar(310) is arranged around a mount in where the substrate is mounted and is moved to the substrate. A power transmitter(320) interlinks a plurality of driving bars. A power supply unit(330) transmits power to one of power transmitters and drives the plural driving bars simultaneously.</p> |
