LOADROCK CHAMBER FOR MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME

摘要

PURPOSE: A load lock chamber for manufacturing a semiconductor device and an apparatus for manufacturing the semiconductor device are provided to prevent a teaching failure of a wafer transfer arm by aligning the position of a wafer through a wafer slide preventing unit. CONSTITUTION: A load lock chamber for manufacturing a semiconductor device includes a wafer receiving device which temporarily stores a wafer. The wafer receiving device includes a receiving frame(210), a wafer support unit(220), and a wafer slide prevention unit. The receiving frame receives a plurality of wafers. A plurality of wafer support units made of metal materials are formed on the sidewall of the receiving frame and supports the wafer. The wafer slide preventing unit is formed on the plurality of wafer support units and prevents the slide of the wafer using temperature difference between the wafer support unit and the wafer.