| 摘要 |
A method of forming a microbump for micropositioning an optical element comprises providing a base substrate, providing a first optical element to be supported by the base substrate, and providing an alignment element capable of locally expanding when locally heated and adapted to support the first optical element from the base substrate. The method further comprises locally heating the alignment element to cause local expansion of the alignment element so as to create a microbump alignment element, terminating heating of the alignment element so as to fix the microbump and securing the alignment element to the base substrate, thereby supporting the first optical element from the base substrate.
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