发明名称 PATTERNING METHOD USING PATTERN OF SELF ASSEMBLED MONOLAYER
摘要 <p>PURPOSE: A patterning method using pattern of a self assembled monolayer is provided to form a pattern with simple by performing dip coating, Spin coating, Casting, and spraying through a material to be pattern under a creation condition for a certain time. CONSTITUTION: In a patterning method using pattern of a self assembled monolayer, a pattern is formed in a substrate(10) with a SAM layer(30). A pattern which is formed with the SAM layer is coated. The SAM layer has a selectivity since the SAM layer has different hydrophilic property and hydrophobicity against the material to be pattern on the substrate.</p>
申请公布号 KR20100054436(A) 申请公布日期 2010.05.25
申请号 KR20080113369 申请日期 2008.11.14
申请人 KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION 发明人 JU, BYEONG KWON;YOON, HO GYU;HUH, JIN WOO;KWON, DAE HONG;JEONG, JIN WOOK
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
主权项
地址