HUMIDITY SENSOR HAVING ANODIC ALUMINUM OXIDE LAYER AND FABRICATING METHOD THEREOF

摘要

PURPOSE: A humidity sensor having an aluminium oxide porous layer and a fabrication method thereof are provided to maximize the surface area of a moisture sensitive layer by utilizing the aluminium oxide porous layer as moisture sensitive layer. CONSTITUTION: A humidity sensor(10) comprises a substrate(11), an aluminium oxide porous layer(13), and an electrode(15). The aluminium oxide porous layer is formed on the top of the substrate and includes a plurality of holes(13a). The electrode is formed on the aluminium oxide porous layer and has a plurality of holes. The holes formed in the electrode and the aluminium oxide porous layer are connected each other. The electrode comprises a first electrode(16) and a second electrode(17) adjacent to the first electrode. The first electrode and the second electrode comprise electrode protrusions(16a,17a).