| 摘要 |
PROBLEM TO BE SOLVED: To provide an improved chemical vapor deposition system that offers coating on a glass sheet substrate. SOLUTION: A chemical vapor deposition system 10 includes: a housing 12 having an entry 30 and an exit 32; and a deposition chamber 14 defined by lower and upper housing 16, 18 having a seal assembly 22 at their horizontal junction which is higher than both the entry 30 and the exit 32, through which glass substrates G to be coated are introduced and exited from the deposition chamber 14. COPYRIGHT: (C)2010,JPO&INPIT
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