| 摘要 |
PROBLEM TO BE SOLVED: To provide a while interference measuring device capable of acquiring a color image in a comparatively short time, and simultaneously acquiring height information by using a plurality of wavelengths. SOLUTION: This while interference measuring device (1) includes: an illumination means (110) capable of irradiating mutually independently first light, second light and third light having each mutually different wavelength respectively to an object (600); interference objective lenses (130) arranged respectively on each optical path of the first light, the second light and the third light irradiated from the illumination means; an imaging means (120) capable of imaging an object; a distance changing means (140) capable of changing a distance between the object and the interference objective lens; and a control means (250) for controlling the illumination means so as to irradiate each of the first light, the second light and the third light successively at a prescribed time interval, while controlling the distance changing means so as to change the distance continuously, and controlling the imaging means so as to image a plurality of monochrome interference images of the object synchronously with irradiation of each of the first light, the second light and the third light through the interference objective lens. COPYRIGHT: (C)2010,JPO&INPIT
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