摘要 |
<P>PROBLEM TO BE SOLVED: To provide multilayer porous electrode foil suitable for efficient production of a multilayer solid-state electrolytic capacitor which is compact, large in capacity, low in ESR (Equivalent Series Resistance) and thin and to provide a method of manufacturing the same, and to provide the multilayer solid-state electrolytic capacitor using the multilayer porous electrode foil. Ž<P>SOLUTION: Tantalum foil or niobium foil is used as a base (1), and tantalum or niobium and a different-phase component which is not phase-soluble with it are mixed to form a film. A laminate (7) is formed by bringing a plurality of filmed bases (1) and spacers (3) sandwiched between the bases (1) into contact with one another, and after the tantalum or niobium and different-phase component are subjected to grain-growth through a vacuum heat treatment of the laminate, the different-phase component and spacers (3) are selectively etched. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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