| 摘要 |
<p>An object is to provide a projection optical system, for example, capable of improving the throughput of scanning exposure in application to scanning exposure apparatus. A projection optical system (PL) for forming an image of a first surface (Ma) and an image of a second surface (Mb) on a third surface (W) comprises a first imaging optical system (G1), a second imaging optical system (G2), a third imaging optical system (G3), a fourth imaging optical system (G4), a fifth imaging optical system (G5), a sixth imaging optical system (G6), a seventh imaging optical system (G7), a first folding member (FM: R37) disposed between the third imaging optical system and the seventh imaging optical system, and a second folding member (FM: R67) disposed between the sixth imaging optical system and the seventh imaging optical system.</p> |
