ZINC OXIDE-BASED TARGET,申请号KR20090087378-传众专利搜索

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发明名称	ZINC OXIDE-BASED TARGET
摘要
申请公布号	KR100958665(B1)	申请公布日期	2010.05.20
申请号	KR20090087378	申请日期	2009.09.16
申请人		发明人
分类号	C04B35/453;C23C14/34;H01L21/203	主分类号	C04B35/453
代理机构		代理人
主权项
地址

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