发明名称 FLAT PANEL DISPLAY MANUFACTURING METHOD
摘要 <p>An alignment mark having a high accuracy and a preferable visibility can easily be formed without reforming the production line or significantly increasing the number of steps.  Furthermore, a flat panel display can be manufactured with a high productivity and a low cost. Provided is a manufacturing method including: a step for forming a photosensitive film on a substrate; a step for exposing the photosensitive film by using an exposure mask (41) so as to form an alignment mark (51); and a step for viewing the alignment mark (51) in the state prior to development of the photosensitive film so as to execute positioning.</p>
申请公布号 WO2010055660(A1) 申请公布日期 2010.05.20
申请号 WO2009JP06035 申请日期 2009.11.12
申请人 PANASONIC CORPORATION;URIU, EIICHI;TANIGUCHI, MOTOHIRO;MURAKOSO, TOMOHIRO;OTANI, TOSHIYA;YAMAMOTO, SOUJI;FUJIWARA, TOSHIAKI;SESEI, TAKASHI;MATSUBARA, NORIYUKI 发明人 URIU, EIICHI;TANIGUCHI, MOTOHIRO;MURAKOSO, TOMOHIRO;OTANI, TOSHIYA;YAMAMOTO, SOUJI;FUJIWARA, TOSHIAKI;SESEI, TAKASHI;MATSUBARA, NORIYUKI
分类号 H01J9/02;G03F9/00;H01J17/16;H01J17/49 主分类号 H01J9/02
代理机构 代理人
主权项
地址