TEMPERATURE CONTROL DEVICE

摘要

PURPOSE: A temperature control device is provided to allow the temperature of a target to follow a desired temperature in rapid by circulating a liquid in a temperature control unit. CONSTITUTION: A heating pathway(40) heats a fluid. The heating path circulates the fluid in a heating controller(11). A coolant path(20) cools the fluid. The coolant channel circulates a frozen fluid in the heating control. A bypass(30) circulates the fluid in the temperature controller without passing the liquid through heating and cooling path. A controller controls the flow ratio of the fluid. A heating portion(42) is installed in the heating path.