| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical element driving device which can quickly perform movement or displacement of an optical element toward a plurality of directions, and to provide a lens barrel, an exposure device, and to provide a method of manufacturing the device. <P>SOLUTION: An optical element driving device 42, includes three driving devices 41A, 41B, and 41C arranged in a periphery of a first mirror 28. Each of the driving devices 41A to 41C has drive source 45 which generates a first electromagnetic force toward a first direction which is parallel to an optical axis 28a of the first mirror 28 and a second electromagnetic force toward a second direction which intersects with the first direction and extends along the periphery of the first mirror 28. <P>COPYRIGHT: (C)2010,JPO&INPIT |
