| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measurement method and a measurement device, which can accurately measure a polarization characteristic. <P>SOLUTION: In the measurement method of measuring a polarization characteristic, an image of a mask pattern is projected on an image plane, light having passed through a first (second) slit is detected while moving the first (second) slit having a width not larger than the wavelength of a light source on the image plane to obtain a first (second) light intensity distribution in the moving direction of the first (second) slit. Respective positions at which the first light intensity distribution is set at a maximum value and a minimum value are determined, an index value is calculated using light intensity at the respective determined positions within a second light intensity distribution, and a polarization characteristic corresponding to the calculated index value is obtained using information representing the relationship between the index value and the polarization characteristic. <P>COPYRIGHT: (C)2010,JPO&INPIT |
