| 摘要 |
PROBLEM TO BE SOLVED: To analyze accurately an insulating sample. SOLUTION: In this spectroscopic analyzer, an X-ray 3 is irradiated onto a sample 2 surface, and simultaneously an electron beam from an electron gun 6 for neutralization is irradiated onto the sample 2 surface, and a bias voltage is applied from a bias voltage power source 14 to a sample stage 4 on which the sample 2 is set, and thereby after charging once uniformly the sample surface, the sample surface is neutralized uniformly by electron beam irradiation from the electron gun 6 for neutralization. The analyzer is provided with a rectangular parallelepiped container 31 so that the sample stage 4 is arranged inside thereof. The container 31 is electrically insulated from the sample 2, and a hole 34 passable by an X-ray, the electron beam from the electron gun 6 for neutralization, or photoelectrons from the sample is provided on an upper wall center part of the container 31 facing to the sample set surface of the stage 4. COPYRIGHT: (C)2010,JPO&INPIT
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