| 摘要 |
<p>The present invention relates to an organic spin coatable anti reflective coating composition comprising a polymer where the polymer comprises (i) at least one unit with fused aromatic rings in the backbone of the polymer of structure (1), (ii) at least one unit with of structure (2), and, (iii) at least one unit with a cyclic aliphatic moiety in the backbone of the polymer of structure (3).(Formula I, II, III) (I) (II) (III) where, Fri is a substituted or unsubstituted fused aromatic ring moiety with 3 or more aromatic rings, R' and R" are independently selected from hydrogen, CrC4 alkyl, Z, CrC4alkyleneZ and where Z is substituted or unsubstituted aromatic moiety, Ri is selected from hydrogen or aromatic moiety, and B is a substituted or unsubstituted cycloaliphatic moiety. The invention further relates to a process for imaging the present composition.</p> |
