| 摘要 |
<p>Disclosed is an acceleration sensor comprising a substrate (1) and a plurality of acceleration detecting units (10) supported by the substrate (1). Each of the acceleration detecting units (10) includes: torsional beams (11) and (12) supported by the substrate (1) and twisted on torsional axes (T1) and (T2); detection frames (21) and (22) so supported by the torsional beams (11) and (12) as to rotate on the torsional axes (T1) and (T2); a detection electrode (40) so formed over the substrate (1) as to face the detection frames (21) and (22); link beams (31) and (32) supported by the detection frames (21) and (22) at positions offset in a top plan view from the torsional axes (T1) and (T2), on the axial lines; and an inertial mass body (2) supported by the link beams (31) and (32) so as to be displaced in the thickness direction of the substrate (1). The plurality of acceleration detecting units (10) contain the first and second acceleration detecting units (10). These first and second acceleration detecting units (10) are juxtaposed along the direction of the first torsional axis (T1). Thus, it is possible to provide a highly precise acceleration sensor for suppressing the vibrations of a high frequency and a high acceleration.</p> |
