METHOD OF MANUFACTURING PHOTOELECTRIC CONVERSION DEVICE, AND PHOTOELECTRIC CONVERSION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a photoelectric conversion device capable of improving productivity by suppressing variation in photoelectric conversion efficiency inside a large-area substrate surface and variation in module output between lots.

SOLUTION: The method of manufacturing the photoelectric conversion device 100 includes a step of forming a photoelectric converting layer 3 of silicon on a substrate 1 by using a plasma CVD technique using a gas containing a silane gas and a hydrogen gas as a raw material gas under the condition where a flow rate of the hydrogen gas per unit area of the substrate 1 is 80 slm/m2or more.

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