发明名称 DISPLAY DEVICE AND MANUFACTURING METHOD THEREOF
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a display device which improves characteristics of a bottom-gate-type thin film transistor. <P>SOLUTION: The display device includes: a conductive layer on which gate electrodes are provided; a first insulation layer provided on the conductive layer; a semiconductor layer which is provided on the first insulation layer and forms semiconductor films containing polycrystalline silicon above the gate electrodes; and a second insulation layer provided on the semiconductor layer. The semiconductor film includes a channel region which overlaps with the gate electrode in a plan view. In the channel region, a portion of the semiconductor film which is in contact with the second insulation layer exhibits higher impurity concentration than a portion of the semiconductor film which is in contact with the first insulation layer. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010114179(A) 申请公布日期 2010.05.20
申请号 JP20080284037 申请日期 2008.11.05
申请人 HITACHI DISPLAYS LTD 发明人 KAMO NAOHIRO;NODA TAKASHI
分类号 H01L29/786;G02F1/1368;G09F9/30;H01L21/336 主分类号 H01L29/786
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