发明名称 |
DISPLAY DEVICE AND MANUFACTURING METHOD THEREOF |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a display device which improves characteristics of a bottom-gate-type thin film transistor. <P>SOLUTION: The display device includes: a conductive layer on which gate electrodes are provided; a first insulation layer provided on the conductive layer; a semiconductor layer which is provided on the first insulation layer and forms semiconductor films containing polycrystalline silicon above the gate electrodes; and a second insulation layer provided on the semiconductor layer. The semiconductor film includes a channel region which overlaps with the gate electrode in a plan view. In the channel region, a portion of the semiconductor film which is in contact with the second insulation layer exhibits higher impurity concentration than a portion of the semiconductor film which is in contact with the first insulation layer. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
申请公布号 |
JP2010114179(A) |
申请公布日期 |
2010.05.20 |
申请号 |
JP20080284037 |
申请日期 |
2008.11.05 |
申请人 |
HITACHI DISPLAYS LTD |
发明人 |
KAMO NAOHIRO;NODA TAKASHI |
分类号 |
H01L29/786;G02F1/1368;G09F9/30;H01L21/336 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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